Template:MEMS Devices

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v t e Microelectromechanical systems
Sensors	Accelerometers Gravimeters Gyroscopes Magnetometers Barometers Scanners Microphones Thermometers
Tools	Micropump Microvalve Mirrors (Digital micromirrors) Relays Scratch drive actuator Magnetic Actuator Electrothermal Actuator Electrostatic Actuator (Comb Drive) Smartdust Oscillators
Technologies	Optical MEMS Optical non-Electrical (MOMS) Nanoelectromechanical (NEMS) Piezoelectric MEMS
Applications	In-situ Mechanical Characterization Biological Analysis (Bio-MEMS) Radio Systems (RF-MEMS) Interferometric displays