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Template:MEMS Devices
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Microelectromechanical systems
Sensors
Accelerometers
Gravimeters
Gyroscopes
Magnetometers
Barometers
Scanners
Microphones
Thermometers
Tools
Micropump
Microvalve
Mirrors
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Digital micromirrors
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Relays
Scratch drive actuator
Magnetic Actuator
Electrothermal Actuator
Electrostatic Actuator (Comb Drive)
Smartdust
Oscillators
Technologies
Optical MEMS
Optical non-Electrical (MOMS)
Nanoelectromechanical (NEMS)
Piezoelectric MEMS
Applications
In-situ Mechanical Characterization
Biological Analysis (Bio-MEMS)
Radio Systems (RF-MEMS)
Interferometric displays